| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric pump configured to reduce the height and to simplify a manufacturing process.SOLUTION: A piezoelectric pump 100 includes a piezoelectric element 110, a diaphragm 120, a housing 130, and a cover plate 150. The housing 130 is embedded and integrally molded by insert molding in which metal plates 131 and 133 are inserted into a mold die and molded through injection molding. The housing 130 is joined to a main surface which is opposite the piezoelectric element 110 of the diaphragm 120. One connection points of the metal plates 131 and 133 of the housing 130 are connected to a first, second, and third electrode terminals 111, 112, and 113 of the piezoelectric element 110 through holes 121, 122, and 123 of the diaphragm 120 by conductive adhesives 31, 32, and 33. The other connection point of the metal plates 131 and 133 of the housing 130 is connected to an alternating current power supply AC of an external circuit. |
