| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate excellent in electric characteristics, and having high heat conductivity.SOLUTION: The substrate is formed by laminating a base body having heat conductivity at temperature 300 K of higher than or equal to 30 W/m, and an oxide film having heat conductivity at temperature 300 K of lower than 100 W/m. The heat conductivity of the base body is higher than the heat conductivity of the oxide film.SELECTED DRAWING: Figure 1 |
