Oxidation resistant induction devices

摘要

Certain embodiments described herein are directed to induction devices comprising an oxidation resistant material. In certain examples, the induction device comprises a coil of wire that is produced from the oxidation resistant material. In some examples, the oxidation resistant induction device can be used to sustain an inductively coupled plasma in a torch.

主权项

1. A method of generating a plasma comprising:
introducing a gas into a torch body; providing radio frequency energy to the torch using an induction device comprising an oxidation resistant material, in which the induction device is configured as a helical induction coil comprising a plurality of coil turns coupled to each other, in which the coil turns comprise an effective amount of the oxidation resistant material to permit a plasma to be sustained in the torch body for at least ten hours without substantial oxidation of the helical induction coil; igniting the gas in the torch body to generate the plasma; and sustaining the plasma in the torch body for at least ten hours without substantial oxidation of the helical induction coil.