Ultra-low oxygen and humility loadport and stocker system

摘要

One or more apparatuses for adjusting at least one of an oxygen content or a water content in a pod and methods of their use are provided, where one or more semiconductor wafer are selectively stored within a storage chamber of the pod. The apparatus comprises the pod and a pipeline. The pod comprises the storage chamber and a port. The port comprises a receptacle having a first opening and a constraining ring proximate the first opening. The pipeline comprises a pipe, a diffuser attached to a first end of the pipe and a controller attached to a second end of the pipe.

主权项

1. An apparatus comprising:
a pod, comprising:
a storage chamber comprising a set of walls defining an interior region in which wafers are held, wherein a first wall of the set of walls defines a first opening;a receptacle disposed within the interior region and defining a second opening overlying the first opening; anda constraining ring disposed within the interior region and surrounding a portion of the receptacle defining the second opening and applying pressure on the receptacle to seal the second opening; and a pipeline comprising:
a pipe;a diffuser attached to a first end of the pipe and dimensioned for insertion into the storage chamber through the first opening and the second opening; anda controller attached to a second end of the pipe.