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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH04276638(A)
申请公布日期
1992.10.01
申请号
JP19910038455
申请日期
1991.03.05
申请人
FUJITSU LTD
发明人
YONEDA YOSHIYUKI;TSUJI KAZUTO;KASAI JUNICHI
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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