IONIC CONDUCTOR AND PRODUCTION OF IONIC CONDUCTOR THIN FILM

摘要

PURPOSE:To form an ionic conductor thin film having a thickness of mum order or less and composed of an ionic conductive ceramic having excellent characteristics by controlling the compositional ratio even in a multi-component system. CONSTITUTION:A zirconium (Zr) target and a yttrium (Y) target are prepared beforehand. Zr and Y are alternately sputtered by alternately using the Zr and Y as the target and the obtained laminated thin films 2,3 are baked and oxidized to obtain the objective ionic conductive oxide ceramic 4.