| 摘要 |
PURPOSE:To prevent the laser output from lowering due to the dropwise condensation or the like in an optical apparatus by a method wherein a small sized simple and efficient dry air generating device is provided. CONSTITUTION:Moisture-containing air, which comes from a compressor section, 51, is fed to a dry air generating device 31 so as to remove the moisture with a separating membrane unit 36 in order to feed dry air in a box, in which an optical apparatus 31 is housed. |
