| 发明名称 |
Process for coating a substrate with metallic layer |
| 摘要 |
A metallic layer is coated onto a substrate by sputtering a layer of chromium followed by a layer of copper whereby the temperature of the substrate is at least about 320 DEG C.
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| 申请公布号 |
US5372685(A) |
申请公布日期 |
1994.12.13 |
| 申请号 |
US19910762466 |
申请日期 |
1991.09.19 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ANSCHEL, MORRIS |
| 分类号 |
C23C14/14;C23C14/18;C23C14/20;H01L23/12;H05K3/24;H05K3/38;(IPC1-7):C23C14/34 |
主分类号 |
C23C14/14 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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