发明名称 Method for manfacturing a thin film transistor by using temperature difference
摘要 The present invention is related to a method for manufacturing a thin film transistor which can improve the yield, characteristics and reliability of the thin film transistor by selectively forming a semiconductor layer on a desired portion using a of a substrate using a temperature difference of the surface of a substrate achieve by heating the substrate with a lamp. The method comprises the steps of forming a black matrix layer of metal on a portion of the whole surface of an insulating glass substrate, forming an insulating layer for protecting the substrate on the whole substrate including the black matrix layer, forming source/drain electrodes on the insulating layer over the black matrix, selectively forming a semiconductor layer on the insulating layer including the source/drain electrodes, forming a gate insulating layer and forming a gate electrode.
申请公布号 US5851859(A) 申请公布日期 1998.12.22
申请号 US19970812535 申请日期 1997.03.07
申请人 GOLDSTAR CO., LTD. 发明人 KIM, JEONG HYUN
分类号 H01L21/336;(IPC1-7):H01L21/336;H01L21/20 主分类号 H01L21/336
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