PRODUCTION OF ETCHING PARTS,申请号JP19970320162-传众专利搜索

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发明名称	PRODUCTION OF ETCHING PARTS
摘要
申请公布号	JPH11152587(A)	申请公布日期	1999.06.08
申请号	JP19970320162	申请日期	1997.11.20
申请人	TOPPAN PRINTING CO LTD	发明人	FUKAGAWA HIROTAKA
分类号	C23F1/00;H01J9/14;H01L23/50;(IPC1-7):C23F1/00	主分类号	C23F1/00
代理机构		代理人
主权项
地址

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