| 摘要 |
PROBLEM TO BE SOLVED: To generate a detection output without requiring any power consumption while simplifying the structure or the peripheral circuit. SOLUTION: A mass member 7 supported through a beam part 8 deformable resiliently with respect to a fixed part 6 on a supporting substrate displaces in the direction of a two-dimensional plane parallel with the surface of the substrate upon application of an acceleration. A coiled detection conductor 10 is provided on the mass member 7 and a magnet 13 interlinking flus with the detection conductor 10 is arranged beneath the mass member 7. Flux density of the magnet 13 is highest at the center and decreases as receding therefrom. An electromagnetic force induced in the detection conductor 10 in response to displacement of the mass member 7 is outputted through a pair of bonding pads 11. |
