| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a wafer positioning apparatus wherein a wafer can be positioned properly on a sample table even when the wafer or the sample table is charged electrostatically. SOLUTION: When positioning a wafer 1 by putting it on a sample table 3, an end 4a of a wafer receiver 17 (lever mechanism) 4 is contacted with one portion of the wafer 1 at an upper point than the top surface of the sample table 3 to receive the wafer 1. In this state, a pressing mechanism 5 presses the wafer 1 against a wafer positioning pin 2 to position the wafer 1. Thereafter, the end 4a of the wafer receiver 4 descends (moves) to put the wafer 1 on the top surface of the sample table 3.</p> |
