| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-cost electrostatic actuator which requires a low driving voltage and low costs for displacing a diaphragm, has a superior durability, is ready to be set in high density and has a high yield, a method of manufacturing the electrostatic actuator, an ink jet recording head with the electrostatic actuator and an ink jet recording apparatus with the ink jet recording head. SOLUTION: There are provided the diaphragm 1 which vibrates by an electrostatic force, an electrode substrate 2 opposite to the diaphragm 1, an electrode 3 formed on the electrode substrate 2 to be opposite to the diaphragm 1, insulating means 4 arranged to a face opposite to both or one of the diaphragm 1 and the electrode 3, and a gap 5 with a predetermined interval formed by the electrode 3 opposite to the diaphragm 1 via the insulating means 4. The gap 5 is constituted of a central interval part 5a formed to an electrode central part of the electrode 3 and having the largest interval, peripheral interval parts 5b each formed of an electrode peripheral part of the electrode 3 in contact with the diaphragm 1 via the insulating means 4 from the central interval part 5a, and inclined interval parts 5c each narrowing the interval towards the peripheral interval part 5b.
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