| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining device capable of making holes into several layers composed of different materials without changing pulse frequency. <P>SOLUTION: A linear polarized pulse laser beam is emitted from a laser beam source 1. The pulse laser beam emitted from the laser source carries out incidence to a polarization direction control element 2. The polarization direction control element can change the polarization direction of the pulse laser beam by controlling from the outside. The reducing element 4 reduces the strength of the pulse laser beam, whose polarization direction is controlled by the polarization direction control element 2, in accordance of the polarization direction. A holding means 7 holds the machining substance 20. A condenser lens 6 condenses the pulse laser beam reduced by the reducing element on the machining substance held by the holding means. <P>COPYRIGHT: (C)2004,JPO</p> |
