| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for measuring a refractive index, which remove unevenness in the temperature of a matching oil and which can perform measurement at high accuracy. SOLUTION: In the refractive index measuring method, the refractive index distribution of an object to be measured is measured, by immersing the object to be measured into the matching oil and by irradiating the object to be measured with a light ray to measure a deflection angle of the transmitted light with respect to the incident light on the object to be measured. The set temperature of the upper part of the matching oil is made lower than the set temperature of the lower part. Even when the outside temperature is higher than the target temperature of the matching oil, the temperature of the overall matching oil can be made approximately uniform, and the precise refractive index measurement is permitted. In such temperature control, a matching oil vessel is divided into a plurality of regions with respect to the up and down directions, in which a jacket 100 permitting independent temperature control of the matching oil A in each region is preferably used. COPYRIGHT: (C)2005,JPO&NCIPI
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