| 摘要 |
<P>PROBLEM TO BE SOLVED: To realize a detailed laminate structure object equivalent to a green sheet method even in the case that a piezoelectric material of bulk is used. <P>SOLUTION: This laminate structure includes a piezoelectric element in which a plurality of electrode layers 2, 3 are formed among a plurality of piezoelectric material layers 1 which disconnect the piezoelectric material to be obtained, a first insulating film 4 which covers electrode layers 2 of a first group in the plurality of the electrode layers in the first field of the piezoelectric element, a second insulating film 5 which covers the electrode layers 3 of a second group in the plurality of the electrode layers, first wiring 8 electrically connected to the electrode layers of the second group and insulated from the electrode layers of the first group by the first insulating film in the first field of the piezoelectric element, and second wiring 7 electrically connected to the electrode layers of the first group and insulated from the electrode layers of the second group by the second insulating film in the second field of the piezoelectric element. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
