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发明名称
TUNABLE GAS DISTRIBUTION PLATE ASSEMBLY AND METHOD FOR DISTRIBUTING GAS
摘要
申请公布号
KR100663799(B1)
申请公布日期
2007.01.03
申请号
KR20040000862
申请日期
2004.01.07
申请人
发明人
分类号
G02F1/13;C23C16/44;C23C16/455;C23C16/509;H01J37/32
主分类号
G02F1/13
代理机构
代理人
主权项
地址
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