| 发明名称 |
One time programming memory cell using MOS device |
| 摘要 |
An electroless plating apparatus is provided. The electroless plating apparatus includes a wafer holder; a chemical dispensing nozzle over the wafer holder; a conduit connected to the chemical dispensing nozzle; and a radiation source over the wafer holder.
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| 申请公布号 |
US7307880(B2) |
申请公布日期 |
2007.12.11 |
| 申请号 |
US20050272657 |
申请日期 |
2005.11.14 |
| 申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
KO CHIN-YUAN;TSAI YUNG-SHENG;LIAO PEI-CHUN |
| 分类号 |
G11C11/34 |
主分类号 |
G11C11/34 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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