Method for producing a coplanar waveguide system on a substrate, and a component for the transmission of electromagnetic waves fabricated in accordance with such a method

摘要

A component for the transmission of electromagnetic waves and a method for producing such a component is provided, whereby conductors of a coplanar waveguide system are embedded in a membrane such that they are at least partially suspended across a back-etched area of the substrate for the decoupling of the conductors from the substrate ( 1 ). An additional substrate is connected to the bottom side of the back-etched area of the substrate in such a way that a hollow cavity is formed.