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发明名称
摘要
申请公布号
JP4015214(B2)
申请公布日期
2007.11.28
申请号
JP19960324310
申请日期
1996.12.04
申请人
发明人
分类号
C01B33/12;C04B41/87;B05D3/06;C04B41/00;C04B41/50;C09D183/04;H01L21/312
主分类号
C01B33/12
代理机构
代理人
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地址
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