| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plate-like body suitable for constituting a holding member of a polishing object hardly adhering to an upper panel of a polishing device or clogged with a polishing agent for reducing the defect of the polishing object due to a line trouble and achieving homogeneous polishing of the polishing object. <P>SOLUTION: When a sheet of thermosetting resin impregnated sheet fiber substrate or a plurality of the overlapped sheets are heated and pressurized between templates to mold the plate-like body, a sheet-like thin plate with thickness of 150 μm or less while having through-holes dotted therein is arranged at least on one side of the sheet fiber substrate to be heated and pressurized, thereby giving the shapes of the through-holes to the molded plate-like body. Preferably, the thickness of the sheet-like thin plate dotted with through-holes is 40-150 μm, and the numerical aperture is 1-60%. <P>COPYRIGHT: (C)2008,JPO&INPIT |
