LIQUID CRYSTAL DISPLAY DEVICE AND MANUFACTURING METHOD OF THE SAME

摘要

An LCD(Liquid Crystal Display) and a method for manufacturing the same are provided to make the thickness of an alignment layer uniform even though the alignment layer is formed of a silicon oxide material. An LCD comprises a first substrate, a second substrate, and a vertical alignment mode liquid crystal layer positioned between the first substrate and the second substrate. The first substrate includes a first insulating substrate and a first alignment layer formed on the first insulating substrate. The second substrate includes a second insulating substrate and a second alignment layer formed on the second insulating substrate. At least one of the first alignment layer and the second alignment layer contains a silicon oxide layer of which a dielectric constant is 5-14. In order to form each of the alignment layers, a target substrate(101) is prepared. The target substrate is induced into a deposition space(11) within a vacuum chamber(10). A silicon gas source and an oxygen gas source are deposited on the target substrate through chemical vapor deposition at a temperature of 30-150°C while plasma is formed in the deposition space, thereby forming the alignment layer of silicon oxide.