| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an ion source capable of easily positioning a field ionization electrode against an opening peripheral edge part of a vessel, and an ion source manufactured by the method. SOLUTION: A sacrificial layer f with a given thickness is formed on a surface including a site opposed to a micro-opening peripheral edge part 21r of the vessel 20 at fixing of the field ionization electrode 23 in the vessel 20, out of surfaces of the field ionization electrode 23, the field ionization electrode 23 is moved toward a tip side in its axis direction with a tip of the field ionization electrode 23 directed toward a micro opening 22, the surface of the sacrificial layer f is made in contact with at least a part of the micro opening peripheral edge part 21r of the vessel 20 to position the field ionization electrode 23 against the micro opening peripheral edge part 21r and fix the field ionization electrode 23 at a position in the positioned vessel 20, and the sacrificial layer f is removed from the field ionization electrode 23 as it is fixed. COPYRIGHT: (C)2009,JPO&INPIT
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