| 摘要 |
A potential measuring device for measuring a potential of a measurement object, includes a detection electrode that faces the measurement object, a reference electrode disposed in a vicinity of the detection electrode that is electrostatically shielded by an electrostatic shield structure with respect to the measurement object, and capacitance modulator for modulating an electrostatic coupled capacitance between the detection electrode and the measurement object to measure a potential of the measurement object by using an electric signal generated on the detection electrode and an electric signal generated on the reference electrode.
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