MASS-ANALYSIS ELECTROMAGNET

摘要

PROBLEM TO BE SOLVED: To inhibit the sediment formed by colliding ion beams with the wall surface of a mass separation analysis tube from being mixed into a target.SOLUTION: Disclosed is a mass-analysis electromagnet which is equipped with an analysis tube 9 having a passage of an ion beam IB formed in the inner region and deflects the ion beam IB in the described direction to separate ions contained in the ion beam IB by the mass difference. In the direction orthogonal to the traveling direction of the ion beam IB and the mass separation direction of the ion beam IB, the analysis tube 9 has at least one shield member SH for shielding the end of the ion beam IB.SELECTED DRAWING: Figure 4