MANUFACTURING METHOD OF ELECTRICAL WIRING MEMBER AND ELECTRICAL WIRING MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of an electrical wiring member having a laminate structure of a copper wiring and melanism layer by searching one having etching speed close to a copper wiring as a material of the melanism layer while maintaining etching controllability, and the electrical wiring member.SOLUTION: A manufacturing method of an electrical wiring member having a process of forming a laminate membrane 6 between a Cu layer 3 and a CuNO-based melanism layer (2a, 2b) on at least one main surface of a substrate, a process for forming a resist layer 4a in a predetermined region on the laminate membrane 6 and a process for contacting the laminate membrane 6 with an etchant to remove a part of areas of the laminate membrane 6.SELECTED DRAWING: Figure 8