发明名称 |
Semiconductor device and method of forming patterned repassivation openings between RDL and UBM to reduce adverse effects of electro-migration |
摘要 |
A semiconductor device has a semiconductor wafer with a first conductive layer formed over a surface of the semiconductor wafer. A first insulating layer is formed over the surface of the semiconductor wafer and first conductive layer. A second conductive layer is formed over the first insulating layer and first conductive layer. A second insulating layer is formed over the first insulating layer and second conductive layer. A plurality of openings is formed in the second insulating layer in a bump formation area of the semiconductor wafer to expose the second conductive layer and reduce adverse effects of electro-migration. The openings are separated by portions of the second insulating layer. A UBM layer is formed over the openings in the second insulating layer in the bump formation area electrically connected to the second conductive layer. A bump is formed over the UBM layer. |
申请公布号 |
US9397058(B2) |
申请公布日期 |
2016.07.19 |
申请号 |
US201414563448 |
申请日期 |
2014.12.08 |
申请人 |
STATS ChipPAC Pte. Ltd. |
发明人 |
Bao Xusheng;Hlaing Ma Phoo Pwint;Zuo Jian |
分类号 |
H01L23/00;H01L23/31;H01L23/532;H01L23/525 |
主分类号 |
H01L23/00 |
代理机构 |
Patent Law Group: Atkins and Associates, P.C. |
代理人 |
Atkins Robert D.;Patent Law Group: Atkins and Associates, P.C. |
主权项 |
1. A method of making a semiconductor device, comprising:
providing a semiconductor die; forming a first conductive layer over the semiconductor die; forming an insulating layer over the first conductive layer; forming a first opening and a second opening in the insulating layer over the first conductive layer; and forming a first bump over the first and second openings in the insulating layer. |
地址 |
Singapore SG |