| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology which is advantageous for controlling a temperature difference in a plurality of spaces with high accuracy.SOLUTION: A temperature control device for controlling the temperatures of a first space and a second space includes: a first control part for controlling the temperature of the first space; a second control part for controlling the temperature of the second space; a first container arranged in the first space whose internal pressure changes in accordance with the temperature of the first space; a second container arranged in the second space whose internal pressure changes in accordance with the temperature of the second space; and a detection part connected to the inside of the first container and the inside of the second container for detecting the pressure difference. The second control part controls the temperature of the second space by using a conversion value obtained by converting the pressure difference detected by the detection part into a temperature difference between the first space and the second space such that the temperature difference between the first space and the second space becomes a target temperature difference.SELECTED DRAWING: Figure 1 |
