| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a metal or metalloid carbonitride film using N-trialkylsilyl-1,2,3-triazole compound as carbonitriding agent.SOLUTION: The problem is solved by a method for producing a metal or metalloid carbonitride film using N-trialkylsilyl-1,2,3-triazole compound as a nitrogen feed source.SELECTED DRAWING: Figure 1 |
