SELF-SELECTING PCM DEVICE NOT REQUIRING DEDICATED SELECTOR TRANSISTOR

摘要

PROBLEM TO BE SOLVED: To provide a self-selecting PCM device that does not require a dedicated selector transistor.SOLUTION: A self-selecting storage device is formed by depositing zinc oxide (ZnO) over layer-change material with the use of an atomic layer deposition (ALD). A diode formed at a ZnO/GST interface exhibits both rectification capability and storage capability in a PCM architecture.SELECTED DRAWING: Figure 7