| 摘要 |
The present invention relates to an optical waveguide-type saturable absorber and, more specifically, relates to an optical waveguide-type saturable absorber using evanescent field interaction which is installed to be used to achieve mode-locking in a femtosecond laser cavity; a manufacturing method thereof, and a femtosecond laser using the same. The method of manufacturing the optical waveguide-type saturable absorber using evanescent field interaction comprises: (a) a step of manufacturing an arrangement-type optical waveguide on a wafer; (b) a step of selectively removing upper parts of the arrangement-type optical waveguide at predetermined intervals to allow an evanescent field of light, which progresses on the arrangement-type optical waveguide manufactured in step (a), to leak to a surface of the optical waveguide and coat the upper part of the arrangement-type optical waveguide which includes the removed parts and has the predetermined intervals with saturable absorbing material, thereby manufacturing an arrangement-type saturable absorbing body with predetermined intervals; and (c) a step of dicing the arrangement-type saturable absorbing body manufactured in step (b) to individually be separated. According to the present invention, mass production of the optical waveguide-type saturable absorber using evanescent field interaction is able to be achieved using a substrate processing technique. |
