| 摘要 |
PROBLEM TO BE SOLVED: To provide a secondary ion mass spectrometry, capable of suppressing the generation and growth of surface roughening in an ion irradiation surface caused by effect of post-coating delay rotation in a depth direction analysis of a material composition by an SIMS, and performing a measurement of high depth resolution while ensuring strictness of the depth direction analysis.SOLUTION: A secondary ion mass spectrometry: irradiates and scans a primary ion in an irradiation range of a sample surface; measures an intensity of a secondary ion radiated from the sample surface; and alternately and repeatedly executes, when measuring a depth direction distribution of a material composition of the sample, a first step of scanning the primary ion while irradiating in the irradiation range and measuring the second ion intensity in a state of mounting the sample and stopping a rotation of a sample stage freely rotating as a center of a rotational axis in a mounting surface of the sample and stilling the sample, and a second step of allowing the sample as a center of the rotational axis to be rotate at a constant angle in a state of stopping the irradiation of the primary ion.SELECTED DRAWING: Figure 5 |
