カセットを位置合わせするための方法と装置

摘要

A cassette alignment tool system (400) comprises a metrology cassette (410) with a communication cable (414) to a cassette controller (412) connected by another communication cable (418) to a computer (416). The metrology cassette is secured to a cassette handler platform to emulate an actual wafer cassette using alignment and registration surfaces such as an H-bar (430) and side rails (570). A distance measuring device (500) may consist of three laser sensors. Independent claims are also included for the following: (a) a system of calibrating a cassette handler to a robot blade; (b) a method of aligning a cassette handler to a robot blade including fitting a frame emulating a wafer cassette, measuring the orientation of a predetermined plane and adjusting the orientation of the cassette handler surface to give a predefined orientation (c) and an alignment toolkit.