Micro-electrostatic motor.

摘要

Miniaturized linear and rotary electrostatic motors. The motors are fabricated by disposing a plurality of conductive lands (310) onto insulating substrates (308) and then filling in the spaces between the lands by deposition of an insulating material (312). A final layer of insulating material is then disposed over each of the entire surfaces containing the lands to form smooth bearing surfaces. The bearing surfaces of two of these elements are placed in contact. In one embodiment, the natural lubrication of the bearing surfaces aids movement. In another embodiment, a special lubricating film is placed between the substrates. Arrangements are made for maintaining alignment of the contacting elements. The lands are selectively energized in a manner to effect movement of one element with respect to the other.