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发明名称
GERAET ZUR CHEMISCHEN MIKROWELLENPLASMA-BEDAMPFUNG
摘要
申请公布号
DE3938830(A1)
申请公布日期
1990.05.31
申请号
DE19893938830
申请日期
1989.11.23
申请人
CANON K.K., TOKIO/TOKYO, JP
发明人
MATSUYAMA, JINSHO, TOKIO/TOKYO, JP
分类号
C23C16/50;C23C16/511;C23C16/54
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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