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发明名称
WAFER COOLING EQUIPMENT IN DRY ETCHING EQUIPMENT
摘要
申请公布号
JPH04275419(A)
申请公布日期
1992.10.01
申请号
JP19910037381
申请日期
1991.03.04
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
FUKUDA MASAFUMI;TANAKA YASUO;ISHIDA TOSHIMICHI;OGURA HIROSHI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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