发明名称 MAGNESIUM OXIDE VAPOR-DEPOSITION MATERIAL
摘要 <P>PROBLEM TO BE SOLVED: To provide a magnesium oxide vapor-deposition material advantageously usable for forming a magnesium oxide film useful as a protective film for the dielectric layer of an alternating current type plasma display panel by an electron beam vapor-deposition method. <P>SOLUTION: The magnesium oxide vapor-deposition material comprises metal oxide in which the valence of the metallic element(s) is any of 3, 4 and 5 in the range of 0.01 to 6 mol%. Alternatively, the magnesium oxide vapor-deposition material comprises alkaline-earth metal oxide other than magnesium oxide, and metal oxide in which the valence of the metallic element(s) is any of 3, 4 and 5 in such a manner that each content is controlled to &ge;0.005 mol% expressed in terms of the metallic element contents, and also, the total content is controlled to &le;6 mol% expressed in terms of the metallic element contents. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005330574(A) 申请公布日期 2005.12.02
申请号 JP20040292642 申请日期 2004.10.05
申请人 UBE MATERIAL INDUSTRIES LTD 发明人 UEKI AKIRA;MASUDA AKIRA;KATO YUZO
分类号 C04B35/053;C23C14/08;C23C14/24;C23C14/32;H01J9/02;H01J11/22;H01J11/34;H01J11/38;H01J11/40 主分类号 C04B35/053
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