| 摘要 |
An SRAM cell and a process for forming an SRAM cell comprises: forming a gate oxide layer on a semiconductor substrate, forming a gate on the gate oxide layer, forming a first ion implantation into the substrate in areas adjacent to the gate, performing a second ion implantation in an area immediately adjacent to the gate, depositing a dielectric layer over the gates, etching the dielectric layer to form a spacer structure therefrom, with the remainder of the dielectric layer being removed by the etching, and a third ion implantation in the substrate in all regions adjacent to the gates and the spacer forming more highly doped regions adjacent to the gate and the spacer.
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