METHOD FOR MANUFACTURING LAMINATE PIEZOELECTRIC ELEMENT

摘要

PROBLEM TO BE SOLVED: To do so that whether the laminate condition of a laminate piezoelectric element is good or not can be determined easily. SOLUTION: According to this method, piezoelectric layers made of a material having an electric-kinetic energy conversion function and electrode layers of an electrode material for a plurality of laminate piezoelectric elements are alternately laminated to form a prim. laminate 14, it is cut at prescribed positions to obtain a plurality of sec. laminates, thereby manufacturing laminate piezoelectric elements. Marks 1, 2 are provided on the piezoelectric layer for detecting the position deviation in in-plane two-dimensional directions to each electrode layer.