Apparatus and method of separating sample and substrate fabrication method

摘要

An apparatus for separating a substrate having a porous layer from the porous layer is provided. A bonded substrate stack (420) having a porous layer (420b) is supported by substrate holders (404, 406) while being rotated. A spray nozzle (418) sprays a high-speed, high-pressure liquid or water (jet medium). The jet thrusts into the bonded substrate (420) through a guide unit (415). The position in the x-axis direction of this guide unit (415) is adjusted by a motor (417) such that the jet is concentrated into the bonding interface of the bonded substrate stack (420).