| 摘要 |
PROBLEM TO BE SOLVED: To move a work WK linearly along a horizontal line, by preventing the moving trajectory of the work from changing into a curve deflected in its self-weight direction when carrying the work by a carrying robot to the carry-in port of a load locking chamber. SOLUTION: A vertical-deflection quantityΔZ of an arm is set by making it correspond to a horizontal-movement quantity X of the tip of the arm. Then, a vertical-deflection quantityΔZ12 corresponding to a present horizontal- movement quantity X12 (P12) of the tip of the arm is determined from the set content in the above. Accordingly, a vertical-movement quantity Z (vertical drive command) is so corrected that the arm is moved by the above deflection quantityΔZ12 in the opposite vertical direction to its deflection direction, and the vertically drive command is outputted.
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