| 摘要 |
PROBLEM TO BE SOLVED: To effectively connect a contactor electrode and to prevent a damage of a terminal and a contactor electrode by independently operating a position holding force between a base unit and a circuit board and a contact pressure of a semiconductor device to the board. SOLUTION: First, a semiconductor device 20 is mounted at a mounting part 15 of a base unit 12A, and a circuit board 11A is mounted on its upper part. Then, a second vacuum unit is driven to generate a position holding force, and the board 11A is effectively held at the unit 12A. Then, to connect a contact electrode 14 of the board 11A to a terminal of the device 20, a first vacuum unit is driven to generate a contact pressure. Thus, since a contact pressure generating mechanism 16 and a position holding force generating mechanism 17 are separately provided, they can be independently controlled. Accordingly, positioning between the board 11A and the unit 12 can be accurately conducted, and the device 20 and the board 11A can be effectively maintained in a stably connected state.
|
