发明名称 SEMICONDUCTOR VALUATION APPARATUS AND METHOD FOR VALUING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor valuation apparatus and a method for valuing a semiconductor device, which are capable of carrying out the reliability valuation for a large number of semiconductor devices at high speed simultaneously. SOLUTION: The semiconductor valuation apparatus includes a plurality of connecting pads 4 located on the peripheries of opening portions 3 and connected with a plurality of pads of a semiconductor wafer to be valued by ones to ones, pins 2 which are located around a circumference of the wafer and test signals are inputted into, and wiring 5 connecting the connecting pads 4 with the pins 2.
申请公布号 JP2002329759(A) 申请公布日期 2002.11.15
申请号 JP20010130829 申请日期 2001.04.27
申请人 TOSHIBA CORP 发明人 SUEYAMA TAKAO
分类号 G01R31/26;G01R31/28;G01R31/30;H01L21/66;(IPC1-7):H01L21/66 主分类号 G01R31/26
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