发明名称 Layered surface acoustic wave sensor
摘要 A surface acoustic wave sensor which incorporates: a) a first layered SAW device consisting of a piezoelectric crystal such as lithium niobate or lithium tantalate with interdigital electrodes on its surface, and second piezoelectric layer such as zinc oxide over said interdigital electrodes b) a second layered SAW device consisting of a piezoelectric crystal with interdigital electrodes on its surface, a second piezoelectric layer over said interdigital electrodes and an analyte sensitive surface such as gold on said second piezoelectric layer c) both saw devices are fabricated on the same substrate d) reflectors are located adjacent the interdigital electrodes in each saw device to reduce the bandwidth of the device e) the resonator circuits of each saw sensor incorporate amplifiers which are dependent.
申请公布号 US7482732(B2) 申请公布日期 2009.01.27
申请号 US20050590367 申请日期 2005.02.25
申请人 MNT INNOVATIONS PTY LTD 发明人 KALANTAR-ZADEH KOUROSH
分类号 H01L41/04;G01N29/00;G01N29/02;G01N29/24;G01N33/48;H03H9/25 主分类号 H01L41/04
代理机构 代理人
主权项
地址