发明名称 CHEMICAL PROCESSING TANK AND CHEMICAL PROCESSOR USING IT
摘要 PROBLEM TO BE SOLVED: To provide a chemical processing tank requiring no temperature control unit in the processing tank, and to provide a chemical processor using it. SOLUTION: In the interior of the processing tank 10 covered with a heat insulator 12, a processing portion 60 for carrying out the processing of a processed object 19 in a single item or in batches, and a liquid storing portion 14-1 for storing the liquid 33 set at a predetermined temperature formed of a low thermally conductive material 11 are provided, and the interior of the processing tank 10 and the processed object 19 are heated or cooled by the heat radiation of the liquid stored in the liquid storing portion 14-1 to maintain them at a predetermined temperature. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009135218(A) 申请公布日期 2009.06.18
申请号 JP20070309120 申请日期 2007.11.29
申请人 SHIMADA PHYS & CHEM IND CO LTD 发明人 HIROKAWA MASATOSHI
分类号 H01L21/304;B08B3/10;H01L21/027;H01L21/306 主分类号 H01L21/304
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