| 发明名称 |
PHYSICAL QUANTITY SENSOR, ELECTRONIC DEVICE, AND MOVING OBJECT |
| 摘要 |
A physical quantity sensor according to the embodiment includes: a substrate; a first movable body which is disposed on the substrate, can be displaced around a first support shaft, and includes a first movable electrode portion; a second movable body which is disposed on the substrate, can be displaced around a second support shaft, and includes a second movable electrode portion; and a fixed electrode portion which is overlapped on the first movable electrode portion and the second movable electrode portion and is disposed on the substrate in a plan view. |
| 申请公布号 |
US2016209442(A9) |
申请公布日期 |
2016.07.21 |
| 申请号 |
US201414451889 |
申请日期 |
2014.08.05 |
| 申请人 |
SEIKO EPSON CORPORATION |
发明人 |
Tanaka Satoru |
| 分类号 |
G01P15/125 |
主分类号 |
G01P15/125 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A physical quantity sensor comprising:
a substrate; a first movable body which is disposed on the substrate, can be displaced around a first support shaft, and includes a first movable electrode portion; a second movable body which is disposed on the substrate, can be displaced around a second support shaft, and includes a second movable electrode portion; and a fixed electrode portion which is overlapped on the first movable electrode portion and the second movable electrode portion and is disposed on the substrate in a plan view. |
| 地址 |
Tokyo JP |
