| 摘要 |
PROBLEM TO BE SOLVED: To achieve highly accurate jointing.SOLUTION: A joint device according to an embodiment comprises a first holding part, a second holding part, a pressurizing part, and a levelness adjustment part. The first holding part sucks and holds a first substrate. The second holding part is arranged opposedly to the first holding part in a vertical direction, and sucks and holds a second substrate. The pressurizing part is connected with a central part of the second holding part, and presses the second substrate against the first substrate by making the second holding part approach the first holding part. The levelness adjustment part is connected at an outer peripheral side of the second holding part than the pressurizing part, and adjusts a levelness of the second holding part.SELECTED DRAWING: Figure 9 |
