| 摘要 |
PROBLEM TO BE SOLVED: To provide a system enabling a device to promptly conduct work on a workpiece.SOLUTION: A precision lathe processing machine 10 is disposed in a main chamber 6, a robot 20 is disposed in a front chamber 5, the main chamber 6 is air-conditioned by a second air-conditioner 31, and the front chamber 5 is air-conditioned by a first air-conditioner 30. An internal temperature of the main chamber 6 and an internal temperature of the front chamber 5 are monitored, and a second door 4 can be opened/closed only when a temperature difference is equal to or smaller than a set value. When the internal temperature of the front chamber 5 relative to the internal temperature of the main chamber 6 is within a temperature range, then a second opening/closing mechanism drives the second door 4 to be opened, the robot 20 grips a workpiece 24 conveyed by a workpiece conveyance device 22 in the front chamber 5, and the workpiece 24 is attached to a spindle 13 of the precision lathe processing machine 10 in the main chamber 6 via a vacuum chuck 14. Since a temperature fluctuation within the main chamber is small when a door provided on a partition cover is opened, a device conducting work on the workpiece becomes promptly operative after the door is closed.SELECTED DRAWING: Figure 1 |
