发明名称 |
Vicinal surfaces of polycrystalline structures |
摘要 |
The present invention provides vicinal surfaces of polycrystalline materials and a method for their preparation. The method includes the deposition of a polycrystalline material on a substrate followed by removing the material from the substrate so as to expose a vicinal surface having stepped terraces. The step of removing the material from the substrate may be preceded by annealing. The vicinal surfaces are useful for a variety of applications. |
申请公布号 |
US9446949(B2) |
申请公布日期 |
2016.09.20 |
申请号 |
US201313774400 |
申请日期 |
2013.02.22 |
申请人 |
Technion Research and Development Foundatin Ltd. |
发明人 |
Pokroy Boaz;Borukhin Shirly |
分类号 |
C23C14/00;C23C16/01;B82B3/00;H01L21/02;H01L21/00 |
主分类号 |
C23C14/00 |
代理机构 |
Rothwell, Figg, Ernst & Manbeck, P.C. |
代理人 |
Rothwell, Figg, Ernst & Manbeck, P.C. |
主权项 |
1. A polycrystalline material comprising grains, each grain being misoriented with respect to its neighbors, wherein said polycrystalline material comprises misoriented grains throughout its entire thickness and on its surfaces, and wherein at least one surface of the polycrystalline material is a vicinal surface having stepped terraces comprising steps of atomic scale. |
地址 |
Haifa IL |