| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump having a rotor for the vacuum pump, a turbo molecular pump, in particular and at least one rotor in which a rotor blade structure is optimized for improving efficiency of the vacuum pump and further to provide a process for manufacture of a rotor that is simple and less-expensive one as much as possible.SOLUTION: This invention relates to a rotor 66 of a vacuum pump, in particular, a turbo molecular pump. The rotor has a rotor shaft 70 rotatably supported around a rotor axis 68 and a plurality of rotor surfaces arranged at the rotor shaft 70 that are continuous in an axial direction and each of the rotor surfaces has a plurality of rotor blades 72. In this case, the number of rotor blades 72 in each of the rotor surfaces within a high vacuum region 74 at an intake side of the vacuum pump is less than that in each of the rotor surfaces in a pre-vacuum or a low vacuum region 76 of the vacuum pump, in particular by twice to four times.SELECTED DRAWING: Figure 7 |
